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Tiny dual-mode MEMS vacuum sensor
Electronics For You
|September 2025
A research team at Aerospace Information Research Institute (AIR) of the Chinese Academy of Sciences (CAS), (Beijing, China) has developed a grain-sized dual-mode MEMS vacuum sensor that delivers high precision and ultra-wide pressure detection.
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It switches intelligently between two resonator modes, offering 0.1Pa resolution and extreme thermal stability.
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